Piezoelectric Energy Harvester

The work presents the design and implementation of a micro-electromechanical system (MEMS) optical switch integrated with a piezoelectric energy harvester. The proposed device addresses the growing demand for sustainable and autonomous micro/nanosystems by harnessing ambient mechanical vibrations to generate electrical energy, thereby eliminating the need for external power sources. The core component of the system is a piezoelectric cantilever beam that converts mechanical vibrations into electrical energy through the direct piezoelectric effect. This harvested energy is utilized to actuate the MEMS optical switch, enabling its operation without external power. The integration of energy harvesting and switching functions into a single MEMS device not only reduces the overall system size but also enhances its reliability and efficiency. The design process involved optimizing the cantilever beam's dimensions and material properties to maximize energy conversion efficiency while ensuring sufficient mechanical displacement for effective optical switching.