MEMS/NEMS Devices and Applications, 3rd Edition

This Reprint presents recent advances in nanoelectromechanical systems (NEMS) and microelectromechanical systems (MEMS) devices and applications. The collected articles cover the design, fabrication, characterization, and application of various MEMS/NEMS-based devices, including physical sensors, chemical sensors, biosensors, gas sensors, optical sensors, flow sensors, actuators, resonators, switches, micromirrors, and energy harvesters. The contributions highlight the rapid development of MEMS/NEMS technologies for miniaturized, high-performance, and low-power microsystems. The published works also demonstrate the integration of advanced materials, microfabrication techniques, and CMOS-compatible processes for emerging sensing and actuator applications. This Reprint provides researchers, engineers, and graduate students with an overview of current trends and future directions in MEMS/NEMS technologies and their multidisciplinary applications.