Scanning Electron Microscopy and X Ray Microanalysis

This practical introduction to the use of scanning electron microscopy (SEM) covers in detail instrumentation, sample preparation, and X-ray microanalysis and instrumentation. Emphasis is on developing an understanding of SEM and becoming proficient at its procedures. Mathematics is kept to a minimum. The chapter on instrumentation covers principles of operation, specimen/electrode interactions, detectors, and operating conditions and limitations. The chapter on specimen preparation discusses specimen characteristcis, drying techniques, coating, and cryo-SEM. The chapter on X-ray microanalysis describes wavelength dispersive systems, energy dispersive systems, operating conditions and limitations, data handling, and other surface analytical techniques. Contains self-assessment questions and responses.